F3M-S825-1【PDF 1/4 页】SENSOR COMB 8" WAFER 25 SLOTS

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Silicon Wafer Mapping Sensor

F3M-S825-1

Allows Simultaneous Mapping of Up

to 25 Silicon Wafers

H Economicalone sensor detects most

wafer types

H 200 mm wafer size

H Automatic and remote teaching

capability

H Self-diagnostic functions reduce

downtime

Ordering Information

Applicable wafer size

Number of cassette slots

Function

Remarks

Part number

8 inches (6.35-mm pitch)

Self-diagnosis

CE marking

F3M-S825-1

Application Examples

Detects Transparent Glass Wafers

With a Transparency of 92%

The F3M-S825-1 allows the mapping of cassettes that have both

silicon wafers and glass wafers.

Automatic Teaching Saves Setting Time

(Remote Teaching Available)

The F3M-S825-1 has an automatic teaching function that ensures

easy adjustments in minimal time. The remote teaching function

allows quick, on-the-fly set up.

Answer-back Alarms for Setting Errors and

Self-diagnostic Alarms for Operation Errors

These alarms help reduce system downtime and shorten

troubleshooting time.

Static Electricity Protection

OMRONs optical system (including emitter and receiver)

prevents malfunction and damageprotecting the Sensor from

static electricity if charged on the semiconductor wafers at the

time of mapping.

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